About: http://webisa.webdatacommons.org/211359061

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This plasma CVD process is a process for decomposing a source gas by high-frequency or microwave glow discharge and forming a deposited film of amorphous silicon on the photoconductive substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com