About: http://webisa.webdatacommons.org/211510654

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 268, wherein at least one of the structures is a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers. 302.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au