About: http://webisa.webdatacommons.org/211588076

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The oxide layer is then patterned using a mask and areas are etched away, including parts of the thin oxide 303 to form cylindrical shaped construction pedestals 304 on top of the thin oxide 303.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com