PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The etch stop layer 118, for example, can be a layer of a material such as doped polysilicon or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com