About: http://webisa.webdatacommons.org/211700792

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The covalent attachment to the substrate surface of the amine layer to a polyacid anhydride is impervious to subsequent processing steps, such as etching and photolithography, as shown in FIG. 5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com