About: http://webisa.webdatacommons.org/211703629

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate bus bar 3 has a film thickness of 1,000 to 4,000 ??? and is made of such metals as Ta, Mo, Ti, Al, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr