About: http://webisa.webdatacommons.org/21177186

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The risk of damage can be further reduced by performing the cleaning operation on non-functional regions of the test sample (e.g., regions such as scribe lines that will not be part of the functional portion(s) of the final devices).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com