| http://www.w3.org/ns/prov#value | - The protective layer 36 can be formed of an electrically insulating material such as a polyimide, borophosphosilicate glass (BPSG), phosphosilicate glass (PSG), TEOS (deposited by the decomposition of tetraethyl orthosilicate), a nitride (e.g., Si3 N4) or an oxide (e.g., SiO2).
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