About: http://webisa.webdatacommons.org/211823092

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The routine searches for candidate chambers C.sub.x and C.sub.y such that C.sub.x is an empty target chamber, C.sub.y contains a wafer W, and the time to move W fromC.sub.y to C.sub.x,is minimum.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com