About: http://webisa.webdatacommons.org/211900540

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This width is the most narrow resist pattern that has ever been obtained in the world, and gives a way to a new device such as a quantum-effect device, says Kiminari Shinagawa of Toho University.
http://www.w3.org/ns/prov#wasQuotedFrom	technologyreview.com