About: http://webisa.webdatacommons.org/211977439

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The pattern 60 may be removed by a suitable process, such as etching or chemical mechanical planarization (CMP).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr