About: http://webisa.webdatacommons.org/212166611

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The barrier layer is a layer of chromium-oxygen-nitrogen, aluminum-oxygen-nitrogen, or titanium-oxygen-nitrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com