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About:
http://webisa.webdatacommons.org/212298514
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http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
Typically, the resultant silicon film 1 has a hydrogen content, i.e it is generally known as ??-Si:H. The thickness Z of the silicon film 1 is typically about 0.1 ??m or less, for example about 0.05 ??m.
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