About: http://webisa.webdatacommons.org/212977322

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Plasma processing, evaporation, ion injection, sputtering, liquid application and other methods may be utilized for the introduction method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com