About: http://webisa.webdatacommons.org/213106306

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, the interlayer film 53 can be formed of an inorganic material such as silicon oxide, silicon nitride, silicon oxynitride, PSG (phosphosilicate glass), BPSG (boron phosphosilicate glass), alumina, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com