About: http://webisa.webdatacommons.org/213120674

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Plasma cleaning or etching is a process whereby a gas is subject to a radio frequency electric field in a reaction chamber to form a plasma.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com