About: http://webisa.webdatacommons.org/213347679

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since the cleaning gas can be made by mixing various kinds of gases, the cleaning gas supply section 28 includes a plurality of cleaning gas supply parts 28 a and 28 b corresponding to the kinds of the gases.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com