About: http://webisa.webdatacommons.org/21338225

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, any planarization process such as the etch-back or the CMP needs not to be performed according to this embodiment of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com