About: http://webisa.webdatacommons.org/213473054

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9A is an alternate embodiment of the piezoelectric layer 140 showing the piezoelectric elements 190 and the chamber 180.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com