About: http://webisa.webdatacommons.org/213712901

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the present invention, a technique including a method and device for removing surface non-uniformities on a surface(s) of a substrate such as an SOI wafer is provided.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk