About: http://webisa.webdatacommons.org/213713748

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to one embodiment of the invention, the micromirror plate is a multi-layered structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com