| http://www.w3.org/ns/prov#value | - The heating member 35 may be a heat generator (heater) in a sheet form that causes a resistance to generate heat with a current and transfers heat directly or through a dielectric body, a member with a high thermal conductivity, for example, a metallic member such as aluminum, which is connected to the heater and is kept in contact with the chip surface 31 a on its surface, and a Peltier element.
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