About: http://webisa.webdatacommons.org/214030309

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Nevertheless, the invention comprehends all forms of reactions, including annealing at higher temperatures, that result in the formation of a metal siticide layer at the sidewalls 211 and 212.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com