About: http://webisa.webdatacommons.org/214259914

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The barrier layer can be formed of a material such as Ta or TaN, for example, by chemical vapor deposition (CVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com