About: http://webisa.webdatacommons.org/214344550

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The structure of claim 12, wherein the high-k gate dielectric includes an oxide including zirconium and titanium.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com