About: http://webisa.webdatacommons.org/21439735

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a sputtering device, and especially to a sputtering device and methods for forming a thin layer on a large substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com