About: http://webisa.webdatacommons.org/214479120

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, except for the regions where the Au???Zn film is formed, a prescribed resist pattern (not shown) is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com