About: http://webisa.webdatacommons.org/214604745

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When a resistance heating element is disposed, a supporting case into which an electrostatic chuck is fitted may be provided with an inlet for blowing a coolant, such as the air, as cooling means.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com