About: http://webisa.webdatacommons.org/214655656

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The required e-beam dosage depends on a number of factors, such as molecular weight of the resist, energy of the electrons, type of substrate, density of written features, and development process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com