About: http://webisa.webdatacommons.org/214664176

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, where the masking liquid is a liquid with an opposite polarity of the immersion liquid. 5.
http://www.w3.org/ns/prov#wasQuotedFrom	radaris.com