About: http://webisa.webdatacommons.org/214736685

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present resist composition is especially suitable for the case where ArF excimer laser is used as exposure li
http://www.w3.org/ns/prov#wasQuotedFrom	google.com