About: http://webisa.webdatacommons.org/214748339

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, doping with phosphorus is conducted using the ion doping method (or ion implantation method), and phosphorus is implanted in a region other than the region on which the oxide film is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk