| http://www.w3.org/ns/prov#value | - Then, as shown in FIG. 16B, a Bax Sr1-x TiO3 film 9 was deposited all over the upper surface of the device including the surface of the thin RuO2 film 15, and thereafter heat-treated in an oxygen-containing atmosphere at a temperature of 550 to 800??? C., and then a TiN film 14 was deposited and worked to form an upper electrode constituted by the TiN film 14.
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