About: http://webisa.webdatacommons.org/214813381

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a positioning apparatus for a stage or the like used in an apparatus or method for manufacturing devices such as semiconductor devices and liquid crystal displays.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com