| http://www.w3.org/ns/prov#value | - The entire access plane 30 is then coated with a 1-2 ??m layer of a second insulative material 34, preferably SiO2 or tetraethyl ortho-silicate (TEOS), using low temperature, i.e. less than or equal to about 350??? C., conformal materials, by a chemical vapor deposition process.
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