About: http://webisa.webdatacommons.org/214867740

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method according to claim 1 wherein said semiconductor substrate comprises semiconductor device structures including gate electrodes and source and drain regions in and on a silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com