About: http://webisa.webdatacommons.org/214912497

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a photolithographic technique used in thin-film head (TFH) and semiconductor processing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr