About: http://webisa.webdatacommons.org/214944619

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The support can use mechanical, vacuum, electrostatic or other clamping techniques to hold the patterning device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk