About: http://webisa.webdatacommons.org/214989792

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method further includes the step of selectively etching an opening through the ILD layer, the opening including a first portion having a first depth and a second portion having a second depth.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com