About: http://webisa.webdatacommons.org/214997885

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate is inserted into a chamber containing a chemically reactive gas, such as CF4, in admixture with O2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com