About: http://webisa.webdatacommons.org/215029369

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention can be used to repair at least two types of defective areas on a microelectronic substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com