About: http://webisa.webdatacommons.org/215036299

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate may comprise damascene or dual damascene structures, including high aspect ratio trenches and vias.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au