About: http://webisa.webdatacommons.org/215041861

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, there is a need for a method and a device that reduce the lateral encroachment of the silicide region.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com