| http://www.w3.org/ns/prov#value | - The switching speed for the device is determined by the product of the wiring resistance: R and the capacitor: C. That is, since the self-diffusion coefficient of the noble metal, such as Cu or Ag, is sufficiently smaller than that of Al, atomic diffusion in crystal grains and a crystal grain boundary, and on the surfaces of a wiring layer as paths is reduced.
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