About: http://webisa.webdatacommons.org/21513184

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The second dielectric layer is preferably a SiCOH type dielectric of low dielectric constant (k<3.2) or ultralow dielectric constant (k<2.4) or a metal such as Ta, Ti, W, combinations of the previous, their silicides and/or nitrides.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com