About: http://webisa.webdatacommons.org/215141475

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interlayer insulating film 16 a is made from an inorganic material such as silicon oxide and silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr