About: http://webisa.webdatacommons.org/215152553

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The inorganic material may be deposited using thermally activated or plasma-enhanced CVD, sputtering, or other such techniques known in the microelectronics field as well as plasma jet deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com