About: http://webisa.webdatacommons.org/215234623

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The respective outlets/inlets 129 of the respective apparatus housings 120 are arranged in such a manner as to face each other, and transport paths f1, f2 of the semiconductor wafer 1 are secured.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com