About: http://webisa.webdatacommons.org/215270900

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the material constituting the film before heat treatment is a metal oxide such as silicon oxide, titanium oxide, zirconium oxide or chromium oxide, it may undergo oxidation by heat treatment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com