About: http://webisa.webdatacommons.org/215284598

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The capping layer (235, FIG. 4 a) is removed by etching using an acid such as HF, H3 PO4, or by using a dry etch.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr